마이크로 가스센서의 열적 성능에 관한 연구 = A Study of Thermal Performances for Micro Gas Sensor

참고문헌 (Reference)

1 "Thermal Induced Stress on the Memberane in Integrated Gas Sensor with Micro-heater" 140-143, 1998

2 "The Effect of Additive in Tin Oxide on the Sensitivity and Selectivity to NOx and CO" 26 : 19-23, 1995

3 "NO2 Gas Sensitivity of Carbon Nanotubes Obtained by Plasma Enhanced Chemical Vapor Deposition" 93 : 333-337, 2003

4 "Model Order Reduction of 3D Electro-thermal Model for a Novel Micromachined Hotplate Gas Sensor 5th Int. Conf. on Thermal and Mechanical Simulation and Experiments in Micro-electronics and Micro- Systems" 263-267, 2004

5 "Heat Transfer with Applications" Prentice Hall 337-371, 1999

6 "Fundamentals of Heat and Mass Transfer" John Wiley and Sons. 2002

7 "Electro-thermal Simulations and Modeling of Micromachined Gas Sensor" 99-102, 2001

8 "Development of High- performance Solid-electrolyte Sensors for NO and NO2" 13~14 : 387-390, 1993

9 "Analysis of High Temperature SOI Microhotplates" 2 : 351-354, 2004October

10 "An Integrated Microstructure with Temperature Control for Gas Sensors" 2 : 515-518, 1997

11 "A Novel Single Chip Thin Film Metal Oxide Array" 93 : 350-355, 2003