Novel Intensity-Based Fiber Optic Vibration Sensor Using Mass-Spring Structure

다국어 초록 (Multilingual Abstract)

In this paper, a novel intensity-based fiber optic vibration sensor using a mass-spring structure, which consists of four serpentine flexure springs and a rectangular aperture within a proof mass, is proposed and its feasibility test is given by the simulation and experiment. An optical collimator is used to broaden the beam which is modulated by the displacement of the rectangular aperture within the proof mass. The proposed fiber optic vibration sensor has been analyzed and designed in terms of the optical and mechanical parts. A mechanical structure has been designed using theoretical analysis, mathematical modeling, and 3D FEM (Finite Element Method) simulation. The relative aperture displacement according to the base vibration is given using FEM simulation, while the output beam power according to the relative displacement is measured by experiment. The simulated sensor sensitivity of 15.731 μW/G and detection range of ±6.087 G are given. By using reference signal, the output signal with 0.75% relative error shows a good stability. The proposed vibration sensor structure has the advantages of a simple structure, low cost, and multi-point sensing characteristic. It also has the potential to be made by MEMS (Micro-Electro-Mechanical System) technology.

참고문헌 (Reference)

1 Y. R. Garcia, "Vibration Detection Using Optical Fiber Sensors" 2010 : 1-12, 2010

2 E. P. Carden, "Vibration Based Condition Monitoring : A Review" 3 (3): 355-377, 2004

3 J. Y. Chen, "Single- and Dual-axis Lateral Capacitive Accelerometers Based on CMOS-MEMS Technology" University of Oslo 2010

4 W. Young, "Roark’s Formulas for Stress and Strain" McGraw-Hill 2002

5 T. K. Gangopadhyay, "Prospects for Fibre Bragg Gratings and Fabry-Perot Interferometers in Fibre-Optic Vibration Sensing" 113 : 20-38, 2004

6 Y. Cao, "Present Situation and Prospects of Vibration Sensors" 515-518, 2012

7 A. Wada, "Optical Fiber Vibration Sensor Using FBG Fabry-Perot Interferomenter with Wavelength Scanning and Fourier Analysis" 12 (12): 225-229, 2012

8 Q. P. Liu, "Novel Fiber Bragg Grating Accelerometer Based on Diaphragm" 12 (12): 3000-3004, 2012

9 A. P. Pisano, "Mechanical Design Issues in Laterally-Driven Microstructures" 23 : 1060-1064, 1990

10 모만개, "Mach-Zehnder 광변조기의 양방향 변조를 이용한 새로운 광섬유격자 센서 검출 방법" 대한전자공학회 47 (47): 17-22, 2010

11 S. Marauska, "MEMS Magnetec Field Sensor Based on Magnetoelectric Composites" 22 (22): 65204-65029, 2012

12 D. J. Inman, "Engineering Vibration" Prentice Hall 2007

13 Y. Alayli, "Applications of A High Accuracy Optical Fiber Displacement Sensor to Vibrometry and Profilometry" 116 : 85-90, 2004

14 S. Saadon, "A Review of Vibration-Based MEMS Piezoelectric Energy Harvesters" 52 : 500-504, 2011

15 G. Perrone, "A Low-Cost Optical Sensor for Noncontact Vibration Measurements" 58 (58): 1650-1656, 2009