반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가

다국어 초록 (Multilingual Abstract)

For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 수치해석방법
• 3. 결과 및 검토
• 4. 결론
• 참고문헌

참고문헌 (Reference)

1 김형태, "반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 비교연구" 대한기계학회 35 (35): 1249-1255, 2011

2 송근수, "반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지절감에 관한 실험적 연구" 대한설비공학회 21 (21): 273-281, 2009

3 Japan Air Cleaning Association Energy saving technical committee, "The energy conversion factors for a semiconductor factory" 46 (46): 16-28, 2007

4 Tsao, J. M., "Saving energy in the make-up air unit(MAU) for semiconductor clean rooms in subtropical areas" 40 : 1387-1393, 2008

5 Yamamoto, H., "Removal of gaseous contaminants by air washer and development of a heat recovery system" Seiken Company 19-30, 2002

6 Yamamoto, H., "Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 3)" 151-154, 2003

7 Fujisawa, S., "Removal of gaseous chemical contaminants as well as heat recovery by air washer (Part 2)" 162-165, 2002

8 Yoshizaki, S., "Removal of chemical compounds from outside air by air washer (part 3) The influence of the temperature and humidity of inlet air on removal efficiency" 1-4, 1999

9 Watanabe, T., "Removal of chemical components in air by air washer" 1-4, 1998

10 Hu, S. C., "Power consumption benchmark for a semiconductor cleanroom facility system" 40 : 1765-1770, 2008

11 Babur, N., "Design concepts in air management systems" 10-18, 2008