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    Effects of oxygen plasma generated in magnetron sputtering of ruthenium oxide on pentacene thin film transistors

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    https://www.riss.kr/link?id=A105079615

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    다국어 초록 (Multilingual Abstract) kakao i 다국어 번역

    Effects of oxygen plasma generated in a sputtering process for deposition of electrodes on pentacene thin films to configure top-contact (TC) transistors have been thoroughly investigated. Reactive oxygen species severely degraded electrical properties of pentacene films during the deposition of RuOx electrodes, leading to a failure of devices. In the off-region, the leakage current increased by about two orders of magnitude, and the subthreshold slope also increased by 6.5 times. The top surface of pentacene films was oxidized by oxygen plasma and C-O and C=O bonds awerere created. The pentacenequinone derivative was confirmed by X-ray photoelectron spectroscopy. The oxidation of pentacene films gives rise to charge traps at the pentacene/electrode interface, which produces a leakage channel between source and drain electrodes. We believe that this side effect of oxygen plasma on the fabrication of TC-devices should be considered carefully.
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    Effects of oxygen plasma generated in a sputtering process for deposition of electrodes on pentacene thin films to configure top-contact (TC) transistors have been thoroughly investigated. Reactive oxygen species severely degraded electrical propertie...

    Effects of oxygen plasma generated in a sputtering process for deposition of electrodes on pentacene thin films to configure top-contact (TC) transistors have been thoroughly investigated. Reactive oxygen species severely degraded electrical properties of pentacene films during the deposition of RuOx electrodes, leading to a failure of devices. In the off-region, the leakage current increased by about two orders of magnitude, and the subthreshold slope also increased by 6.5 times. The top surface of pentacene films was oxidized by oxygen plasma and C-O and C=O bonds awerere created. The pentacenequinone derivative was confirmed by X-ray photoelectron spectroscopy. The oxidation of pentacene films gives rise to charge traps at the pentacene/electrode interface, which produces a leakage channel between source and drain electrodes. We believe that this side effect of oxygen plasma on the fabrication of TC-devices should be considered carefully.

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    참고문헌 (Reference)

    1 A. Vollmer, 600 : 4004-, 2006

    2 Y. Matsumoto, 16 : 199-, 2005

    3 C. R. Newman, 16 : 4436-, 2004

    4 E. Fortunato, 24 : 2945-, 2012

    5 A. R. Murphy, 107 : 1066-, 2007

    6 S. W. Rhee, 18 : 5437-, 2008

    7 A. Facchetti, 17 : 1705-, 2005

    8 C. D. Dimitrakopoulos, 14 : 99-, 2002

    9 P. Cosseddu, 515 : 7551-, 2007

    10 D. J. Yun, 97 : 073303-, 2010

    1 A. Vollmer, 600 : 4004-, 2006

    2 Y. Matsumoto, 16 : 199-, 2005

    3 C. R. Newman, 16 : 4436-, 2004

    4 E. Fortunato, 24 : 2945-, 2012

    5 A. R. Murphy, 107 : 1066-, 2007

    6 S. W. Rhee, 18 : 5437-, 2008

    7 A. Facchetti, 17 : 1705-, 2005

    8 C. D. Dimitrakopoulos, 14 : 99-, 2002

    9 P. Cosseddu, 515 : 7551-, 2007

    10 D. J. Yun, 97 : 073303-, 2010

    11 D. J. Yun, 155 : H899-, 2008

    12 C. W. Chu, 87 : 193508-, 2005

    13 X. -H. Zhang, 8 : 718-, 2007

    14 D. H. Kim, 47 : 5672-, 2008

    15 A. Rolland, 140 : 3679-, 1993

    16 M. McDowell, 88 : 073505-, 2006

    17 H. K. Kim, 5 : 1327-, 2013

    18 K. T. Kamtekar, 22 : 572-, 2010

    19 F. So, 22 : 3762-, 2010

    20 M. Park, 4 : 11307-, 2016

    21 S. J. Kang, 72 : 205328-, 2005

    22 P. Parisse, 8 : 498-, 2007

    23 H. W. Zan, 48 : 031501-, 2009

    24 K. Ono, 63 : 9699-, 2007

    25 박성묵, "Photodegradation of organic dyes via competitive direct reduction/indirect oxidation on InSnS2 under visible light" 한국화학공학회 34 (34): 1500-1503, 2017

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    학술지 이력

    학술지 이력
    연월일 이력구분 이력상세 등재구분
    2023 평가 해외DB학술지평가 신청대상 (해외등재 학술지 평가)
    2020-01-01 등재 등재학술지 유지 (해외등재 학술지 평가) KCI등재
    2016-06-21 학술지명변경 한글명 : The Korean Journal of Chemical Engineering -> Korean Journal of Chemical Engineering
    외국어명 : The Korean Journal of Chemical Engineering -> Korean Journal of Chemical Engineering
    KCI등재
    2011-01-01 등재 등재학술지 유지 (등재유지) KCI등재
    2009-01-01 등재 등재학술지 유지 (등재유지) KCI등재
    2007-09-27 학회명변경 영문명 : The Korean Institute Of Chemical Engineers -> The Korean Institute of Chemical Engineers KCI등재
    2007-09-03 학술지명변경 한글명 : The Korean Journal of Chemical Engineeri -> The Korean Journal of Chemical Engineering
    외국어명 : The Korean Journal of Chemical Engineeri -> The Korean Journal of Chemical Engineering
    KCI등재
    2007-01-01 등재 등재학술지 유지 (등재유지) KCI등재
    2005-01-01 등재 등재학술지 유지 (등재유지) KCI등재
    2002-01-01 등재 등재학술지 선정 (등재후보2차) KCI등재
    1999-07-01 등재 등재후보학술지 선정 (신규평가) KCI등재후보
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    학술지 인용정보

    학술지 인용정보
    기준연도 WOS-KCI 통합IF(2년) KCIF(2년) KCIF(3년)
    2016 1.92 0.72 1.4
    KCIF(4년) KCIF(5년) 중심성지수(3년) 즉시성지수
    1.15 0.94 0.403 0.14
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