컴퓨터 해석을 통한 Slot 코팅공정에서 운전방향의 코팅품질 평가 및 다이 설계 = Coater Die Design and Coating Quality Evaluation in the Machine Direction of Slot Coating Through Computer Simulation

다국어 초록 (Multilingual Abstract)

Slot coating has been widely spread in photo resist coating on glass for flat display monitor. High quality of coating is required as high quality of image in display is needed. Coating quality in the slot coating is divided into nozzle direction quality and machine direction quality. Nozzle direction quality is related to flow uniformity inside the die whereas machine direction quality is related to die lip design and operational conditions. In this study coating uniformity in the machine direction of slot coating has been investigated through computer simulation. Die lip angle and die lip length were considered as outside die geometry and coating speed was considered as operational condition. Coating behavior has been analyzed and coating quality has been evaluated through computer simulation. Coating thickness decreased and coating uniformity increased as coating speed increased. However, the stability of meniscus formation was reduced and subsequently coating stability was reduced as coating speed increased. Coating thickness deviation decreased as die lip angle increased in down stream die. Coating thickness decreased and time to reaching steady state increased as increased die lip length in down stream die.