선택적 빔 차단을 통한 집속이온빔 가공 정밀도 향상

다국어 초록 (Multilingual Abstract)

In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

참고문헌 (Reference)

1 Kitslaara, P, "Towards the creation of quantum dots using FIB technology" 83 (83): 811-814, 2006

2 Arshak, K, "The mechanism of the ion beam inhibited etching formation in Gallium-FIB implanted resist films" 78 (78): 39-46, 2005

3 Lee, H. W, "Simulation of Focused Ion beam Processes for Micro-Nano Machining" 25 (25): 44-49, 2008

4 Tseng,A.A, "Recent developments in micromilling using focused ion beam technology" 14 (14): R15-R34, 2004

5 Han J, "Prediction of nanopattern topography using two-dimensional focused ion beam milling with beam irradiation intervals" 87 (87): 1-9, 2010

6 Jack Zhou, "Nanohole Fabrication using FIB, EB and AFM for Biomedical Applications" 한국정밀공학회 7 (7): 18-22, 2006

7 Han, J, "Microfabrication method using a combination of local ion implantation and magnetorheological finishing" 2 (2): 026503-, 2009

8 Nakamatsua, K.-I, "Mechanical property evaluation of Au-coated nanospring fabricated by combination of focused-ion-beam chemical vapor deposition and sputter coating" 24 (24): 3169-3172, 2006

9 Rauscher, M, "Limitations to low-voltage focused ion beam operation" 83 (83): 815-818, 2006

10 Bischoff, L, "Focused ion beam sputtering investigations on SiC" 184 (184): 372-376, 2001

11 Volkert, C. A, "Focused ion beam microscopy and micromachining" 32 (32): 389-395, 2007

12 Kang, E. G, "FIB Sputtering Process Technology and Its Application" 25 (25): 23-31, 2008