세개의 Gauss 동을 중첩한 간섭계형 결상계의 진폭임펄스와 초분해능 = Amplitude impulse and superresolution of interferometric imaging system obtained by superposing three Gauss pupils

다국어 초록 (Multilingual Abstract)

The amplitude impulse S(x) of an interferometric optical imaging system for λ=193 nm(ArF laser) and NA=0.5 is derived for the pupil with superposed three Gauss pupils $A_1$($\omega$), $A_{2-}$($\omega$) and $A_{2+}$($\omega$). It is shown that FWHM of S(x) can be far less than the Rayleigh's criterion of resolution $\frac{1}{2}{\epsilon}_R$, where ${\epsilon}_R$ is equal to λ=193 nm in the present case of NA=0.5. The three Gauss pupils are provided in an optical system which consists of a Twyman-Green interferometer and an imaging system. The system is proposed and relevent optical components are discussed. Siloxane polymer is suggested for fabrications of amplitude modulation plates. In the present work, we assumed the system is free from aberration and linear. The case that the system has residual aberrations is important, and further work is necessary.