상압 플라즈마 표면처리가 기판과 코팅층 사이에 생기는 중간층과 부착특성에 미치는 영향 = Effect of Atmospheric Plasma Treatment on Interlayer Formation and Adhesion Strength between Substrate and Coating Layer

다국어 초록 (Multilingual Abstract)

The effect of atmospheric plasma treatment on change in the interlayer and the adhesion strength between the substrate and the coating layer was investigated. Soda-lime glass and indium-tin oxide (ITO) coated glass plates were used as the substrate, and the surface energy was calculated from the wetting angle of liquids on the substrates. To study the effect of surface treatment on the adhesion strength between the substrate and the coating layer, chrome (Cr) thin film was deposited on the surface treated substrates by sputtering. For the analysis of the interlayer, auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) were used. The surface energy of the substrates increased as a function of exposure time for atmospheric plasma surface treatment. When the exposure time exceeded 20 sec, the surface energy increased to a saturated value of 76 mJ/m2. The adhesion strength between the substrate and Cr coating layer according to the surface treatment showed a similar trend of the surface energy. The atmospheric plasma surface treatment using argon and oxygen gases promoted the formation of an interlayer that was identified as chrome oxide (Cr2O3). The thicker chrome-oxide interlayer contributed to the increase in adhesion strength between the substrates and the Cr coating layer.