Most SPM sensors utilize a current-imaging technique or force-imaging techniques that allow imaging nanoscale topography of the surface using a nanoscale tip on cantilever. In this work, the various cantilevers were microfabricated with a SiO_(2) thin...
Most SPM sensors utilize a current-imaging technique or force-imaging techniques that allow imaging nanoscale topography of the surface using a nanoscale tip on cantilever. In this work, the various cantilevers were microfabricated with a SiO_(2) thin film or a Si_(3)N_(4) thin film. Thermal imaging technique using microfabricated Si_(3)N_(4) cantilevers has been investigated. The temperature change and heat flow across the fabricated bimetallic cantilever will create angular bending of the bimetallic metal-coated lever. Its thermal response was qualitatively examined during an endothermic chemical reaction using optical deflection methods. The chemical used in this experiment is the tetradecanol CH_(3)(CH_(2))13OH, with a known theoretical phase transition temperature of ∼ 313 K.