유연힌지 최적화를 이용한 스핀들 스테이지 설계에 관한 연구 = A study on designing spindle stage using optimization of flexure

다국어 초록 (Multilingual Abstract)

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required.
Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

참고문헌 (Reference)

1 이동원 ; 하석재 ; 박정연 ; 윤길상, "레이저 열-압착 본딩 시스템의 Lateral Force 감소를 위한 유연 힌지의 설계" 한국금형공학회 14 (14): 23-30, 2020

2 J. W. Ryu, "Optimal design of a flexure hinge based XYf wafer stage" 21 (21): 18-28, 1997

3 Y. Koseki, "Kinematic analysis of a translational 3-dof micro-parallel mechanism using the matrix method" 16 (16): 251-264, 2002

4 Z. Pan, "Improving Robotic Machining Accuracy by Real-time Compensation" 2009

5 J. M. Paros, "How to design flexure hinges" 37 : 151-156, 1965

6 S. T. Smith, "Flexures: elements of elastic mechanisms" CRC Press 2000

7 W. Xu, "Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations" 19 (19): 4-10, 1996

8 N. Lobontiu, "Corner-filleted flexure hinges" 123 (123): 346-352, 2001

9 C. G. E. Boender, "Bayesian stopping rules for multi start global optimization methods" 37 (37): 59-80, 1987

10 X. Shi, "An online real-time path compensation system for industrial robots based on laser tracker" 13 : 2016