PECVD법에 의해 증착된 Ti-B-C 코팅막 내의 보론함량과 증착온도에 따른 미세구조 및 기계적 물성의 변화

다국어 초록 (Multilingual Abstract)

Ternary Ti-B-C coatings were synthesized on WC-Co and Si wafers substrates by a PECVD technique using a gaseous mixture of TiCI₄, BCI₃, CH₄, Ar, and H₂. The effects of deposition variables such as substrate temperature, gas ratio, Rx＝[BCI₃/(CH₄＋BCI₃)] on the microstructure and mechanical properties of Ti-B-C coatings were investigated. From our instrumental analyses, the synthesized Ti-B-C coatings was confirmed to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB₂, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB₂, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti-B-C coatings increased from ~23 ㎬ of TiC to -38 ㎬ of Ti0.33B0.55C0.11 coatings with increasing the boron content. The Ti0.33B0.55C0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB₂ and TiC. The microstruture and microhardness value of Ti-B-C coatings were largely depend on the deposition temperature.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 실험 방법
• 3. 결과 및 고찰
• 4. 결론
• 후기
• 참고문헌