Electrical and Optical Properties in Transparent Conducting Oxides: Effect of Ultra Violet Irradiation

다국어 초록 (Multilingual Abstract)

A design of experiments was applied in order to investigate the effect of processing variables in UV irradiation on the electrical/optical properties in indium-zinc oxide thin films, The processing variables, equivalently input variables are listed as UV irradiation time, oxygen flow rate, and chamber pressure. The statistical significance of Ultra Violet (UV) treatment was confirmed using a paired-t test. The full factorial 23 design was employed to determine significant main and interaction effects in UV irradiation process. The chamber pressure and the interaction between UV irradiation time and O2 flow rate were found to be statistically significant at the significance level of 0.1. Furthermore, the optimized approach was proposed in achieving the improved conductivity after UV irradiation.Key words Indium-zinc oxides, UV irradiation, Electrical/Optical Properties, Design of experiments

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