The humidity sensing characteristics of the films were investigated in the relative range of 11 ~ 85[%RH], changing frequency from 1[㎑) to 100[㎑]. By controlling microstructure of the films by anodic oxidation conditions with changing solution con...
The humidity sensing characteristics of the films were investigated in the relative range of 11 ~ 85[%RH], changing frequency from 1[㎑) to 100[㎑]. By controlling microstructure of the films by anodic oxidation conditions with changing solution concentration, reaction time and current densiry, humidity sensing characteristics of the impedance and capacitance was improved. With increased relative humidity, impedace was decreased and capacitance was increased.
Larger variation in the impedance characteristics of the samples fabricated by anodic oxidation was observed to be 3.86[㏁] from 17.7[㏁] with decreased measuring frequency at 1[%] oxalic acid. current density 500[㎃/㎠]. That variation rate was 78[%].