반사방지 특성을 통일시킨 실리콘 질화막 간의 패시베이션 특성 비교 = Comparison of Passivation Property on Hydrogenated Silicon Nitrides whose Antireflection Properties are Identical

다국어 초록 (Multilingual Abstract)

Silicon nitride ($SiN_x:H$) films made by plasma enhanced chemical vapor deposition (PECVD) are generally used as antireflection layers and passivation layers on solar cells. In this study, we investigated the properties of silicon nitride ($SiN_x:H$) films made by PECVD. The passivation properties of $SiN_x:H$ are focused on by making the antireflection properties identical. To make equivalent optical properties of silicon nitride films, the refractive index and thickness of the films are fixed at 2.0 and 90 nm, respectively. This limit makes it easier to evaluate silicon nitride film as a passivation layer in realistic application situations. Next, the effects of the mixture ratio of the process gases with silane ($SiH_4$) and ammonia ($NH_3$) on the passivation qualities of silicon nitride film are evaluated. The absorption coefficient of each film was evaluated by spectrometric ellipsometry, the minority carrier lifetimes were evaluated by quasi-steady-state photo-conductance (QSSPC) measurement. The optical properties were obtained using a UV-visible spectrophotometer. The interface properties were determined by capacitance-voltage (C-V) measurement and the film components were identified by Fourier transform infrared spectroscopy (FT-IR) and Rutherford backscattering spectroscopy detection (RBS) - elastic recoil detection (ERD). In hydrogen passivation, gas ratios of 1:1 and 1:3 show the best surface passivation property among the samples.

참고문헌 (Reference)

1 A. G. Aberle, 8 : 473-, 2000

2 J. -F. Lelievre, 93 : 1281-, 2009

3 A. cuevas, 2003

4 F. Duerinck, 72 : 231-, 2002

5 S. Dutttagupta, 15 : 78-, 2012

6 A. E. Amrani, 33 : 2289-, 2008

7 B. L. Sopori, 41/42 : 159-, 1996

8 M. J-Szymacha, 520 : 1308-, 2011

9 J. D. Moschner, 12 : 21-, 2004

10 Y. Wan, 3 : 032113-, 2013

11 H. Mackel, 92 : 2602-, 2002

12 이경동, "결정질 실리콘 태양전지용 SiNx:H 박막 특성의 최적화 연구" 한국진공학회 21 (21): 29-35, 2012

13 M. A. Green, "Solar Cells" Prentice-Hall 161-164, 1982

14 M.A.Green, "Silicon Solar Cells Advanced Principles & Practice" University of New South Wales, Centre for Photovoltaic Devices and Systems 32-54, 1995