1 Suhas V. Patankar, "Numerical Heat Transfer and Fluid Flow" McGrow-Hill Book Company 1980
2 Tretheway, D., "Modeling of Heat Transport and Wafer Healing Effects during Plasma Etching" 143 : 3674-3680, 1996
3 K. Asano, "Fundamental Study of an electrostatic chuck for silicon wafer handling" 38 (38): 2002
4 L.D. Hartsough, "Electrostatic Wafer Holding" 35 (35): 87-90, 1993
5 S. A. Khomyakov, "Attraction and Accuracy Characteristic of Electrostatic Chucks" 50 (50): 24-, 1979
1 Suhas V. Patankar, "Numerical Heat Transfer and Fluid Flow" McGrow-Hill Book Company 1980
2 Tretheway, D., "Modeling of Heat Transport and Wafer Healing Effects during Plasma Etching" 143 : 3674-3680, 1996
3 K. Asano, "Fundamental Study of an electrostatic chuck for silicon wafer handling" 38 (38): 2002
4 L.D. Hartsough, "Electrostatic Wafer Holding" 35 (35): 87-90, 1993
5 S. A. Khomyakov, "Attraction and Accuracy Characteristic of Electrostatic Chucks" 50 (50): 24-, 1979