리니어모터를 이용한 초정밀 유정압안내면 개발

다국어 초록 (Multilingual Abstract)

In order to discuss the availability of hydrostatic guideways driven by the core less linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 0.01 ㎛ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, micro step response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ㎛ of positioning error and 0.09 ㎛ of repeatability, and it shows the stable response against the 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

참고문헌 (Reference)

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5 Rank Pneumo Co, "1992. Fig. 11 Velocity variation of guideway in the range of ultra precision cutting" na (na):