고순도 AlN분체 합성을 위한 Al-N-H-Cl 반응계의 열역학적 평형조성 = Thermodynamic Equilibrium Compositions in the Al-N-H-Cl Reacting System for the Synthesis of High-purity AlN Powders

다국어 초록 (Multilingual Abstract)

Thermodynamic equilibrium compositions in the Al-N-H-Cl system were determined to predict the theoretical equilibrium yields of AlN by the vapor phase reaction of NH₃ and AlCl₃. The calculation procedure of the equilibrium composition was to determine the mixture composition which corresponds to the minimum total Gibbs free energy of the reacting system. The equilibrium yields of AlN at 600-1200 K showed above 90% when the initial amounts of AlCl₃and of NH₃were equal and below ?? moles, respectively. The effect of the total pressure on the equilibrium yields was insignificant. The domain above 95% yields according to the initial ratio of AlCl₃to NH₃at 1200 K and 1300 K was also given. The theoretical aspects for the synthesis of high-purity AlN powders by the gas phase reaction of AlCl₃and NH₃were discussed.