In this paper, $TiO_{2}-V_{2}O_{5}$ humidity sensors are fabricated by Sol-Gel method. For the establishment of optimum processing condition which is good humidity sensitive characteristics for specimens, their microstructures and crystalline-structur...
In this paper, $TiO_{2}-V_{2}O_{5}$ humidity sensors are fabricated by Sol-Gel method. For the establishment of optimum processing condition which is good humidity sensitive characteristics for specimens, their microstructures and crystalline-structures are analysed. Grain size increases with substitution rate of $V^{5+}$ on $Ti^{4+}$ site. From the analysis of XRD, $V^{5+}$ peak can't confirm with $V_{2}O_{5}$ rate. Their humidity sensitive characteristics is good at 1mol% of $V_{2}O_{5}$ rate and heat-treated at $700^{\circ}C$. The capacitance of specimens decreases with frequency.