분무열분해법에 의한 SnO₂ 박막의 증착에 관한 연구 = The Deposition of SnO₂ Films by Spray Pyrolysis

다국어 초록 (Multilingual Abstract)

The influence of deposition parameters on the deposition of SnO₂ thin films produced by spray pyrolysis have been studied.
In the case of spray solution with the concentration of 0.01M, at low deposition temperature the deposition was controlled by surface reaction and the portion controlled by mass transfer is increased with increasing deposition temperature to 400℃. Above 400℃, the deposition is controlled by mass transfer at low spray pressure, and by surfase reaction at high spray pressure. As the concentration of spray solution increased the deposition rate increased, and in our experiment the deposition depends on the Rideal-Eley mechanism. The deposition rate increased with increasing substrate temperature up to 400t and then decreased due to homogeneous nucleation. The thickness of the deposit increased with increasing spray duration, and the adhesion between substrate and deposit was formed physically.

목차 (Table of Contents)

• I. 서론
• II. 실험
• III. 결과 및 고찰
• IV. 결론
• ABSTRACT