산화질소 검출용 마이크로 가스센서 제조공정 = MEMS-Based Micro Sensor Detecting the Nitrogen Oxide Gases

다국어 초록 (Multilingual Abstract)

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

참고문헌 (Reference)

1 N. Taguchi,

2 D. E. Williams, 57 : 1-, 1999

3 K. Saji, 171-, 1983

4 P. Ivanov, 118 : 311-, 2006

5 W. Y. Chung, 200 : 329-, 1991

6 M. Levy, 6 (6): 335-, 1980

7 T. A. Tones, 8 : 281-, 1985

8 T. Siciliano, 133 (133): 321-, 2008

9 P. J. Shaver, 11 : 255-, 1967

10 J. C. Loh,

11 J. -H. Yoon, 192 (192): 668-, 2011

12 B. -J. Kim, 10 (10): 1-, 2012

13 E. Jones, "The pellistor catalytic gas detector, In Solid State Gas Sensors" Adam Hilger 17-24, 1987

14 Si-Dong Kim, "Design, Fabrication and Characterization of a Low-Power Gas Sensor with High Sensitivity to CO Gas" 한국물리학회 51 (51): 2069-2076, 2007