다중 프로브 검사 계측 장비를 위한 단차 표준 인증 물질의 설계 및 제작

다국어 초록 (Multilingual Abstract)

Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multiprobe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of 10× and 100×. CRMs with nominal step heights of 0.5 ㎛, 1 ㎛, 3 ㎛, 5 ㎛, 7 ㎛, and 10 μm were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm (1σ).

참고문헌 (Reference)

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6 ISO-5436-1(Type A) guideline, "International Organizationfor Standardization"