Maxwell 방정식의 효율적인 풀이를 위한 경계요소법과 웨이브렛의 결합 = the Combination of Wavelet with Boundary Element Method for the Efficient Solution of Maxwell's Equations

국문 초록 (Abstract)

Maxwell 방정식을 효율적으로 풀기 위해 웨이브렛 행렬 변환(wavelet matrix transformation)과 경계요소법(Boundary Element Method)을 결합하는 방법을 제안하였으며, 2차원 위상변이 마스크(phase- shifting mask) 문제에 적용하였다. 계산 결과를 해석적인 해 및 참고문헌의 결과와 비교함으로써 구현된 모듈의 정확도를 검증하였으며, 제안된 방법이 경계요소법만을 적용한 경우에 비해 연산 시간과 메모리 사용 측면에서 효율적임을 확인하였다.

다국어 초록 (Multilingual Abstract)

The wavelet transform is combined with the boundary element method (BEM), to solve efficiently the Maxwell's equation and the proposed method is applied to the electromagnetic problem for the analysis of topological effects of phase-shifting masks. The accuracy of the module developed was verified by comparison with both analytic solutions and published results. In addition, it was found that the boundary element method in combination with the wavelet matrix transform would be more efficient than the conventional methods based on the BEM in views of the calculation speed and the usage of computer memory.