마이크로 외팔보 점착방지용 돌기의 설계변수 분석 = Design Parameter Analysis of Stiction-Prevention Bump for Micro Cantilever

다국어 초록 (Multilingual Abstract)

Micro-bumps have been recognized to prevent stiction in MEMS that hinders proper operation and reduces the durability. Analytical models have been developed to describe separation phenomena of cylindrical and hemispherical bumps from the surface of semi-infinite body. The developed model is employed to obtain the pull-off force, the force to separate the bump from the surface, and to obtain the condition for spontaneous separation of the bump. It is demonstrated that the bumps can be used to prevent the stiction of the microstructure such as micro-cantilevers. Moreover the hemispherical bump is more efficient for stiction-prevention than the cylindrical bump when bumps have the same cross-sectional area.