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KISS
Thin films of SnO₂, SnO₂-Sb₂O₃ were fabricated by the use of DC sputtering system and electron beam etaporation system. The films were analyzed by means of scanning electron microscopy and Auger electron spectroscopy. The results showed the fi...
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RISS 인기검색어
박막가스 Sensor의 제조 및 그 특성에 관한 연구 = A Study on the Preparation and Properties of Thin Film Gas Sensors
한글로보기https://www.riss.kr/link?id=A3282893
- 저자
- 발행기관
- 학술지명
- 권호사항
-
발행연도
1981
-
작성언어
Korean
-
KDC
560.000
-
자료형태
학술저널
-
수록면
1-6(6쪽)
- 제공처
- 소장기관
-
0
상세조회 -
0
다운로드
부가정보
다국어 초록 (Multilingual Abstract)
Thin films of SnO₂, SnO₂-Sb₂O₃ were fabricated by the use of DC sputtering system and electron beam etaporation system. The films were analyzed by means of scanning electron microscopy and Auger electron spectroscopy. The results showed the films to be polycrystalline with an average grain size of 0.6 μ and the relative ratio of Sn and O₂ peaks to be 1.5/1.
The investigation of characteristics-of electrical conductivity versus thin film surface temperature showed the oxygen gas to be adsorbed in the temperature range of 230-400℃. Thin films had good sensitivity to acetone, alcohol, SO₂ and propane gas. The optimum thin film surface temperature was found to be about 450℃.
The investigation of characteristics-of electrical conductivity versus thin film surface temperature showed the oxygen gas to be adsorbed in the temperature range of 230-400℃. Thin films had good sensitivity to acetone, alcohol, SO₂ and propane gas. The optimum thin film surface temperature was found to be about 450℃.
Thin films of SnO₂, SnO₂-Sb₂O₃ were fabricated by the use of DC sputtering system and electron beam etaporation system. The films were analyzed by means of scanning electron microscopy and Auger electron spectroscopy. The results showed the films to be polycrystalline with an average grain size of 0.6 μ and the relative ratio of Sn and O₂ peaks to be 1.5/1.
The investigation of characteristics-of electrical conductivity versus thin film surface temperature showed the oxygen gas to be adsorbed in the temperature range of 230-400℃. Thin films had good sensitivity to acetone, alcohol, SO₂ and propane gas. The optimum thin film surface temperature was found to be about 450℃.
동일학술지(권/호) 다른 논문
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- 경북대학교 전자기술연구소
- 박의열
- 1981
-
- 경북대학교 전자기술연구소
- 유기영
- 1981
-
- 경북대학교 전자기술연구소
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-
Ba-Ferrite의 자기적 성질에 미치는 Fe2O3분체의 영향
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- 조상희
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