A SIMOX SOI Hall sensor has been fabricated and its characteristics were measured at temperatures between 20℃ and 260℃. Output Hall voltage varied linearly with supplied current, showing good linearity. The Hall voltage and the offset voltage init...
A SIMOX SOI Hall sensor has been fabricated and its characteristics were measured at temperatures between 20℃ and 260℃. Output Hall voltage varied linearly with supplied current, showing good linearity. The Hall voltage and the offset voltage initially increased slightly and then decreased with temperature due possibly to the electron mobility variation with temperature. Nearly constant product sensitivity throughout the temperature range indicates that this Hall sensor could be used for high temperature applications.