Nanomechanical resonators have attracted much attention in the last decade due to superior performance with high sensitivity and high oscillation frequency. In this paper, we propose carbon-based high frequency nanomechanical resonators by utilizing p...
Nanomechanical resonators have attracted much attention in the last decade due to superior performance with high sensitivity and high oscillation frequency. In this paper, we propose carbon-based high frequency nanomechanical resonators by utilizing pyrolyzed carbon layers with embedded single walled carbonnanotube (swCNT) layers. SwCNTs are used as a reinforcement material and also lower the density of the resonator. Dynamic behaviors of the fabricated resonators, including fundamental frequency, Q-factor, and frequency tuning characteristics were investigated using magnetomotive dynamic flexural measurements. We believe that the carbon-based nanomechanical resonators have promising applications in sensitive nanodevices with low power consumption. These materials are also ideal because of the low-cost batch processing capability and could be an alternative for silicon-based nanodevices.