A micromanipulator means the device that can manipulate the object with high precision. It is required high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous desig...
A micromanipulator means the device that can manipulate the object with high precision. It is required high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs are hard to satisfy the functional requirements of the system due to difficulty in modeling and optimization process applying the independent axiomatic design. Therefore, this paper suggests a new design based on semi-coupled, axiomatic design. A planar 3 DOF parallel type micromanipulator is chosen as an exemplary device. To check the effectiveness of the 5-bar spring, simulation is performed by FEM. The simulation result satisfy natural frequency and a workspace, simultaneously, which is in very close agreement with the specified goal of design.