선형이송기구의 5자유도 오차운동 측정 시스템

다국어 초록 (Multilingual Abstract)

A new measurement system is proposed that can detect five-degree-of-freedom (five-DOF) error motions of a linear stage with high sensitivity. The system divided into a moving target part and a stationary detection part. The moving target part, which is composed of three retro-reflectors, is mounted on a carriage of a linear stage. The stationary detection part is composed of three laser sources, ball-lenses, and PSDs, and placed on a reference table. Three parallel laser beams from laser sources is reflected at three retro-reflectors, and then arrived at the PSDs after passing through the ball-lenses. Relative position changes of the retro-reflectors by the multi-DOF motions of the moving target part shift the optical paths of the reflected beams, and the PSDs detect the displacement of the laser beam. The ball-lenses play a pivotal role in displacement magnification of the beam spot on PSDs. In this paper, the relationships between the output of the three PSDs and the five-DOF motions of the moving target part are derived, and the system model is defined from it. Based on the ray-tracing method, simulations are performed to estimate the proposed measurement system’s performances. The results show that the proposed method is useful to precisely measure the error motions of linear stages.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 측정원리
• 3. 모의 측정실험
• 4. 결론
• 참고문헌