OLED 박막 증착공정에서 유도로 내부의 분자유동 해석

다국어 초록 (Multilingual Abstract)

Molecular flows inside a guide block in the OLED (organic luminescent emitting device) deposition process have been simulated using DSMC (direct simulation Monte Carlo) method. Because the organic materials are evaporated under vacuum, the molecules flow at a high Knudsen number of the free molecular regime, where the continuum mechanics is not valid. The guide block is designed as a part of the linear cell source to transport the evaporated materials to a deposition chamber. When solving the flows, the inlet boundary condition is proved to affect significantly the whole flow pattern. Thus, it is proposed that the pressure should be specified at the inlet. From the analysis of the density distributions at the nozzle exit of the guide block, it is shown that the longer nozzle can emit molecules more straightly. Finally, a nondimensionalized mass flow profile is obtained by the numerical experiments, where various nozzle widths and inlet pressures are tested.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 수치해석 기법
• 3. 결과 및 고찰
• 4. 결론
• 후기
• 참고문헌