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      Arc Ion Plating 方式에 依한 TiCN 蒸着시 反應가스가 코팅층에 미치는 影響

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      This work was intended to study the effect of a partial pressure ratio and a total pressure of reactive gases on the properties of TiC<SUB>x</SUB>N<SUB>1-x</SUB> coated layer. In this regard, various TiC<SUB>x</SUB>...

      This work was intended to study the effect of a partial pressure ratio and a total pressure of reactive gases on the properties of TiC<SUB>x</SUB>N<SUB>1-x</SUB> coated layer. In this regard, various TiC<SUB>x</SUB>N<SUB>1-x</SUB> coatings were synthesized with C₂H₂ and N₂ mixture gas of different compositions by Arc Ion Plating process which has been highlighted for an industrial purpose. It was revealed from colors and X-ray diffraction patterns that the concentration of carbon of a TiC<SUB>x</SUB>N<SUB>1-x</SUB> coating increases with a partial pressure ratio (PC₂H₂/PN₂) as well as a total pressure of C₂H₂ and N₂ mixture gas. Accordingly, the hardness of TiC<SUB>x</SUB>N<SUB>1-x</SUB> coated layer increased but the adhesion to the substrate of SKH 51 was degraded. On the other hand, the deposition rate was independent of a partial pressure ratio and a total pressure of mixture gas. It was found that a uniform gas distribution is critical for an industrial application since the composition of a coating depends strongly on the location of a substrate inside of the furnace. As a result of milling tests with different TiC<SUB>x</SUB>N<SUB>1-x</SUB> coated end mills, the one which has a low carbon concentration was better than others studied in this work.

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