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https://www.riss.kr/link?id=M9728394
Woodbury, NY : American Institute of Physics, c1998
1998
영어
621.39/5 판사항(21)
1563967537 (set)
1563968681 (CD-ROM)
단행본(다권본)
New York(State)
Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler ... [et al.].
xv, 960 p. : ill. ; 28 cm. + 1 computer optical disk
AIP conference proceedings, 0094-243x ; 449 AIP conference proceedings ; no. 449.
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref.
Accompanying computer disc contains full text from the book.
Includes bibliographical references and indexes.
International Conference on Characterization and Metrology for ULSI Technology
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