열공압 방식으로 구동되는 미세 유체 제어 시스템의 제작 및 특성 = Fabrications and Characteristics of Microfluidic Systems Actuated by Thermopneumatic Method

다국어 초록 (Multilingual Abstract)

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at a duty ratio of 1％ and a frequency of 2 ㎐ with a fixed power of 500 ㎽. The measured power at flow cut-off is 500 ㎽ for the microvalve whose channel width, depth and membrane thickness were 400 ㎛, 110 ㎛ and 320 ㎛, respectively.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 미세 유체 제어 시스템의 구조 및 동작 원리
• 3. 실험
• 4. 결과 및 토론
• 5. 결론
• 참고문헌
• 저자소개

참고문헌 (Reference)

1 김진호, "열공압 방식의 polydimethylsiloxane 마이크로 밸브의 제작 및 특성" 53 (53): 231-236, 2004.

2 Yevgeny Berdichevsky,, "UV/ozone modification of poly(dimethylsiloxane) microfluidic channels" Sensors and actuators. B 97 (97): 402-408, 2004.

3 Jin-Ho Kim, "Thermopneumatic-actuated PDMS Microvalve" 73-74 : 864-869, 2004.

4 Maria A. Schwarz, "Recent developments in detecton methods for microfabricated analytical devices" 1 : 1-6, 2001

5 김주호, "Polydimethylsiloxane 채널과 indium tin oxide 전극을 이용한 일회용 전기화학적 검출 시스템" 54 (54): 227-231, 2005.

6 Robin H. Liu, "Fabrication and Characterization of Hydrogel-Based Microvalves" 11 (11): 45-53, 2002

7 Jong-Chul Yoo,, "Dynamic Characteristics of the Micro-Fluidic Systems Actuated by Thermopneumatic-Method" Japanese Journal of Applied Physics, To be published

8 S. Matsumoto, "Development of bi-directional valve-less micropump for liquid" Twelfth IEEE International Conference on Micro Electro Mechanical Systems 141-146, 1999

9 Mark A. Burns,, "An Integrated Nanoliter DNA Analysis Device" 282 : 484-487, 1998.

10 Woo Young Sim, "A phase-change type micropump with aluminum flap valves" 13 : 286-294, 2003.

11 Jin-Ho Kim, "A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass" 120 (120): 365-369, 2005.

12 Hidekuni Takao,, "A Thermo-pneumatic In-channel Microvalve With PDMS Diaphragm for Integrated Blood Examination System on Silicon" The 12th International Conference on Solid State Sensors, Actuators and Microsystems 139-142,

13 Ju-Ho Kim, "A Development of a Microfabricated Disposable Microchip with a Capillary Electrophoresis and Integrated Three-Electrode Electrochemical Detection" 20 (20): 2314-2317, 2005.