마이크로 프레스 구현을 위한 인치웜 모터의 개발

다국어 초록 (Multilingual Abstract)

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consist of a extending actuator that provides displacement of tool guide, and two clamping actuators which provide the holding force. PZT element have low tensile strength and shear. So often fail under tensile and shear stress. To prevent failure, the pre-load housing was designed and fabricated to the optimal design condition according to the variation of the hinge stiffness by FEM(Finite Element Method) analysis. This is open-loop control and input voltage signals are three square wave of 50~60 percent duty cycles at each of the PZT elements. Also the dynamic characteristics of the system was verified by experiment results of the inchworm motor.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. PZT를 이용한 인치웜 구동 방식 원리
• 3. 인치웜 모터의 모델링
• 4. 인치웜 모터의 정적, 동적해석
• 5. 시스템 구성 및 제작
• 6. 실험 및 고찰
• 7. 결론
• 후기
• 참고문헌