미세성형공정에서의 폴리머 레올로지의 정량화

다국어 초록 (Multilingual Abstract)

The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to<br/>
its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of<br/>
quantitating the embossing process , simple parametric study about embossing time have been carried out<br/>
using high-resolution masters which patterned by the DRIE process and laser machining. Under the various<br/>
embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been<br/>
investigated. Also, a study about simulating the viscous flow during embossing process has planned and<br/>
continuum scale FDM analysis was applied on this simulation. With currently available test data and<br/>
condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

목차 (Table of Contents)

• Abstract
  
• 1. 서론
  
• 2. 연구 동향
  
• 3. 기초 성형 시험
  
• 4. 기초 성형 해석
  
• 5. 결론
  
• 후기
  
• 참고문헌