그래핀은 뛰어난 전기적, 기계적 광학적 특성을 보여주는 2차원 재료로, 2D 재료 연구 분야를 여는데 있어 크게 이바지한 물질이다. 그러나, 대부분의 유망한 특성은 단결정 그래핀으로부터 ...

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https://www.riss.kr/link?id=T15826967
서울 : 서울대학교 대학원, 2021
2021
영어
graphene ; CVD ; grain boundary ; doping ; atomic layer deposition ; sheet resistance ; enhancing electrical property ; 그래핀 ; 결정립 ; 도핑 ; 단원자층 증착법 ; 도핑 ; 면저항 ; 전기적 특성 향상
620.1
서울
xvi, 200 ; 26 cm
지도교수: 김기범
I804:11032-000000165225
0
상세조회0
다운로드그래핀은 뛰어난 전기적, 기계적 광학적 특성을 보여주는 2차원 재료로, 2D 재료 연구 분야를 여는데 있어 크게 이바지한 물질이다. 그러나, 대부분의 유망한 특성은 단결정 그래핀으로부터 ...
그래핀은 뛰어난 전기적, 기계적 광학적 특성을 보여주는 2차원 재료로, 2D 재료
연구 분야를 여는데 있어 크게 이바지한 물질이다. 그러나, 대부분의 유망한 특성은
단결정 그래핀으로부터 나오는데, 이때 단결정 그래핀은 수십 마이크로 미터 단위밖
에 제작이 불가능하다. 웨이퍼 스케일로 그래핀을 합성하기 위하여, 화학적 방법으로
합성하는 방법 (chemical exfoliation), SiC 기판에서 Si을 선택적으로 승화하는 방법
및 CVD (Chemical vapor deposition) 방법이 있는데, CVD는 거의 무한한 크기로의
합성이 가능하며 품질이 좋아 가장 각광받는 방법 중 하나이다. 하지만 CVD로 합성
한 그래핀은 몇 가지의 이유로 단결정 그래핀의 좋은 특성을 보여주지 않기 때문에
CVD 그래핀의 전기적 특성을 높이기 위한 대규모 노력과 연구가 수행되었다.
1장과 2장은 서론으로, 1 장에서는 그래핀의 기본 물성과 합성하는 방법에 대하여
소개하였다. 2 장에서는 그래핀의 전기적 특성을 제한하는, 기판 산란, 결정립 산란
및 기타 산란 인자의 대하여 고찰해 보았으며, 이러한 한계를 극복하고 그래핀의 전
기적 특성을 향상시키기 위하여 현재 어떠한 연구가 이루어지고 있는지에 대하여 요
약하였다. 그 중에서도 도핑하는 방법과 그래핀의 도메인 크기를 키우는 방법이 현재
주된 연구의 흐름이다.
3장은 4장의 준비 부분으로, 그래핀의 결정립이 미치는 영향을 살펴보기 위하여
다양한 크기의 그래핀을 합성하였다. 그래핀의 CVD 성장에 대한 기본 이론을 통하
여, 메탄가스의 양을 감소시킴으로써 도메인 크기 성장을 꾀할 수 있었으며 실험 상
태의 최적화를 위하여 heterogeneous 핵생성을 막기 위한 전기연마 공정과, 낮은 메
탄가스 공급에 의하여 그래핀의 성장이 저해되는 현상을 막기 위하여 2 단계 성장
과정이 제안되었다.
4장은 이 연구의 두 본문 중 하나로, 그래핀의 결정립이 전기적 특성에 미치는 영
향에 대하여 고찰하였다. 그 결과 도핑 유무에 관계없이 도메인 크기가 증가함에 따
라 면저항의 감소를 관찰할 수 있었으며, 이는 캐리어 이동도의 증가에 기인한다는
현상을 발견하였다. Ohmic scaling 모델을 통하여 추가로 분석한 결과 17 um의 도메
인을 가지는 그래핀의 경우 20% 만큼의 면저항의 비중을 결정립이 차지하고 있다는
것을 알 수 있었다. 또한 Mayadas-Shatzkes 모델에 적용한 결과 R 값이 0.97로 굉
장히 높은 값을 띄고 있다는 것을 확인할 수 있었으며, 결국 두 모델을 이용한 연구
를 통하여 그래핀의 결정립이 강산 캐리어 산란 효과를 가지고 있음을 밝힐 수 있었
다. 도핑 공정은 또한 다양한 크기의 그래핀에 적용을 하여, 그래핀의 결정립이 도핑
하지 않았을 때와 유사하게 강한 산란효과를 가짐을 확인할 수 있었고, 추가적으로
관찰된 사실 중 하나는 그래핀의 도핑 효율이 결정립에서 더 높다는 것이었다. 도핑
방법과 그래핀의 도메인 크기를 키우는 두 가지 방법을 종합한 결과, 10 um 이상의
그래핀을 증착한 후 도핑을 수행하는 것이 가장 효과적으로 그래핀의 전기적 특성을
향상시킬 수 있다는 사실을 발견하였다.
5장에서는 Ru을 단원자증착법을 (ALD) 통하여 결정립에만 선택적으로 도펀트를
증착하였으며, 그래핀의 결정립이 도핑에 미치는 영향에 대하여 고찰하였다. 그 결과
ALD 20 사이클에서 180 ohm/sq, 50 사이클에서 125 ohm/sq 로 전기적 특성이 뛰어
난 그래핀을 증착할 수 있었다. 또한 Ru evaporation을 그래핀에 수행하여 그래핀 표
면에 homogeneous하게 Ru을 증착함으로써, ALD 를 통하여 도핑하였을 때와 비교하
였으며, 그 결과 그래핀의 결정립에서 도핑의 효율이 더 높다는 것을 밝혀내게 되었
다. 위 연구를 통하여 그래핀의 결정립이 전기적 특성에 미치는 영향에 대하여 잘 파
악할 수 있었으며, 추후 그래핀의 결정립을 포함하는 전기적 특성, 도핑 효과에 대한
연구에 기초로 활용할 수 있을 것으로 기대한다
다국어 초록 (Multilingual Abstract)
Graphene is two-dimensional (2D) material showing outstanding electrical, mechanical, optical property, which opens the 2D material research field. However, most promising properties is from the single crystal graphene which only can collect dozens of...
Graphene is two-dimensional (2D) material showing outstanding electrical, mechanical, optical property, which opens the 2D material research field. However, most promising properties is from the single crystal graphene which only can collect dozens of um size. To synthesize wafer scale graphene chemical exfoliation, selective sublimation of Si from SiC, and CVD process were proposed, CVD is the one of the most promising method because of its unlimited scalability and high quality. The CVD grown graphene, however, does not showing remarkable property as single crystal graphene for several reason. Therefore, massive efforts and studies were conducted to increase electrical property of graphene.
Chapters 1 and 2 are the introductory sections. In Chapter 1, basic property and synthesis method for graphene is placed. In chapter 2, the electrical limiting factors will be described, the bulk resistivity of graphene, substrate scattering, grain boundary scattering and other scattering factors. Then, the current approaches to overcome the limits and to enhancing electrical property of graphene will be summarized. Among them, doping and enlarging grain size emphasized as a major electrical property enhancing methods.
Chapter 3 is the preparation part of chapter 4, synthesizing various size of graphene to study grain boundary effect. The basis theory for CVD growth is studied and reducing carbon source supply enlarging grain size of graphene was achieved. During optimizing experimental condition, the electropolishing process and two-step growth process were proposed, to prevent heterogeneous nucleation and unfilled gap problem because of low carbon source supply.
In chapter 4, one of the two main part on this study, grain size dependence on electrical property of undoped/doped graphene is evaluated. The sheet resistance is reduced as the grain size increased since the carrier mobility enhanced, regardless of undoping/doping. Further analysis conducted by ohmic scaling model, it shows that 17 um size of graphene has 20 % of grain boundary sheet resistance. Another model, Mayadas-Shatzkes model, also applied on graphene, the resultant shows 0.97 of reflection coefficient, much large than other metals. In both model studies, grain boundary is considerably act as strong scattering center and controlling grain size turned out to be very important. The doping process also applied on various size of graphene and the similar result was observed form both models, considering grain boundary, the noticeable presumptive fact revealed that the doping efficiency is higher on the grain boundary of graphene. The conjugated experiment of doping and enlarging grain size shows that at small grain size i.g., 1 um, grain size effect is too strong, even doping process applied about 1000 ohm/sq can be achieved, however, more than 10 um of grain size, doping process becomes more effect than enlarging grain size. Therefore, it was confirmed that the most efficient way for enhancing electrical property of graphene is growing over 10 um size of graphene and conducting doping process.
In Chapter 5 grain boundary effect on doping is further studied by employing Ru ALD on graphene. By the selective Ru deposition on grain boundary of graphene 180 ohm/sq at 20 cycle, 125 ohm/sq at 50 cycle is achieved. The control experiment, Ru evaporation is conducted to compare the doping effect with Ru ALD. The result shows that doping is occurred more efficiently on grain boundary of graphene.
To conclude, the characteristic of graphene grain boundary on electrical property massively performed in this study. The grain boundary is revealed to the high impact on electrical property of graphene. Interestingly, the grain boundary acts as scattering center for carrier transport, however, it also acts as aa efficient doping site for doping process. In this study, the basics of the grain boundary property on undoped/doped graphene is established and expected to the fundamentals for the grain boundary involving electrical property researches.
목차 (Table of Contents)
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