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Metrology and diagnostic techniques for nanoelectronics

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https://www.riss.kr/link?id=M14377880

저자

Ma, Zhiyong ; Seiler, David G
발행사항
Singapore : Pan Stanford Publishing, 2016
발행연도
2016
작성언어
영어
주제어

Nanoelectronics ; Metrology
DDC
621.381 판사항(23)
ISBN
9814745081 (hbk)
9789814745086 (hbk)
자료형태
일반단행본
발행국(도시)
싱가포르
서명/저자사항
Metrology and diagnostic techniques for nanoelectronics / edited by Zhiyong Ma, David G. Seiler.
형태사항
xii, 1411 p. : ill. ; 24 cm.
일반주기명
Includes bibliographical references and index.
Model-based scanning electron microscopy critical-dimension metrology for 3D nanostructures -- X-ray metrology for semiconductor fabrication -- Advancements in ellipsometric and scatteronmetric analysis -- 3D-AFM measurements for semiconductor structures and devices -- SIMS analysis on the transistor scale: probing composition and dopants in nonplanar, confined 3D volumes -- Transistor strain measurement techniques and their applications -- Scanning spreading resistance microscopy (SSRM): high-resolution 2D and 3D carrier mapping of semiconductor nanostructures -- Microstructure characterization of nanoscale materials and interconnects -- Characterization of the chemistry and mechanical properties of interconnect materials and interfaces: impact on interconnect reliability -- Characterization of plasma damage for low-k dielectric films -- Defect characterization and metrology -- 3D electron tomography for nanostructures -- Electron energy loss spectroscopy of semiconductor nanostructures and oxides -- Atom probe tomography of semiconductor nanostructures -- Characterization and metrology for graphene materials, structures, and devices -- Characterization of magnetic nanostructures for spin-torque memory applications with marco- and microscale ferromagnetic resonance -- Band alignment measurement by internal photoemission spectroscopy -- Electrical characterization of nanoscale transistors: emphasis on traps associated with MOS gate stacks -- Charge pumping for reliability characterization and testing of nanoelectronic devices -- Application of in situ resistance and nanocalorimetry measurements for nanoelectroinc thin-film materials -- Methodology and challenges in characterization of 3D package interconnection materials and processes -- 3D interconnect characterization using raman spectroscopy -- Advances in 3D interconnect characterization techniques for fault isolation and defect imaging -- Optical and electrical nanoprobing for circuit diagnostics -- Automated tools for methods for debug and diagnosis.
소장기관
- 부산대학교 중앙도서관
- 성균관대학교 삼성학술정보관
- 연세대학교 학술문화처 도서관
- 한국과학기술원(KAIST) 학술문화관

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목차 (Table of Contents)

자료제공 :
Model-Based Scanning Electron Microscopy Critical Dimension Metrology for 3D Nanostructures. X-Ray Metrology for Semiconductor Fabrication. Advancements in Ellipsometric and Scatterometric Analysis. 3

자료제공 :
Model-Based Scanning Electron Microscopy Critical Dimension Metrology for 3D Nanostructures. X-Ray Metrology for Semiconductor Fabrication. Advancements in Ellipsometric and Scatterometric Analysis. 3

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온라인 서점 구매 정보
서점명	서명	판매현황	종이책			전자책 구매링크
서점명	서명	판매현황	정가	판매가(할인율)	포인트(포인트몰)	전자책 구매링크
	Metrology and Diagnostic Techniques for Nanoelectronics	판매중	862,620원	776,350원 (10%)	38,820포인트 (5%)