A study of semiconductor manufacturing equipment and with the fact that regarding a wafer transfer system, when in the study it follows in order to load one funeral wafer with horizontality the load department which is prepared In order to do transpor...
A study of semiconductor manufacturing equipment and with the fact that regarding a wafer transfer system, when in the study it follows in order to load one funeral wafer with horizontality the load department which is prepared In order to do transportation direction of the minute description wafer steering the steering department which is prepared, The minute description wafer is transported, in order to do the drive the drive department which is prepared And minute description load it will call on top and it will load and the minute description steering department will be prepared to a lower part, the minute description drive it will call and attaches and the base frame department which it supports The technique it will be able to improve the civil official efficiency of the wafer transfer which is smooth in order to include and wafer transfer system.