압저항 연성해석을 통한 고충격 미소가속도계의 최적설계 및 성능 비교

다국어 초록 (Multilingual Abstract)

In order to detect a high impact that occurs at earth-penetration weapons, piezoresistive micro accelerometers are generally used because of its structural sturdiness. In this paper, structural optimization for piezoresistive micro accelerations was introduced to improve its performances from initial designs. In the optimization formulations, the following sensor performances are considered; maximum stress level, resonant frequencies, and sensor sensitivity calculated by piezoresistive-structural coupled-field analysis. We adopted two reference models: (1) a piezoresistive type silicon micromachined high-shock accelerometer with a bonded hinge structure and (2) a silicon micromachined shock accelerometer with twin-mass-plate structure. Several optimization with different formulations are performed for the examples and their optimum results are compared and discussed.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 유한요소모델링 및 해석
• 3. 최적설계
• 4. 결론
• 후기
• 참고문헌