The uniform alignment of liquid crystals (LCs) is a key element in the fabrication of liquid crystal displays (LCDs). Rubbing-processed alignment of the LC has been widely used. However, rubbing method has some disadvantages induced by physical contac...
The uniform alignment of liquid crystals (LCs) is a key element in the fabrication of liquid crystal displays (LCDs). Rubbing-processed alignment of the LC has been widely used. However, rubbing method has some disadvantages induced by physical contact such as scratches, accumulation of electrostatic charge and generation of fine dust. To overcome these obstacles, LC alignment layer without rubbing process has been studied. An ultraviolet (UV) photoalignment technique, nanoimprint lithography, oblique deposition, and ionbeam (IB) irradiation are major alternatives. Among these techniques, IB irradiation technique is one of the noncontact alignment processes that use Ar+ ion-induced plasma to provide controllability in a production of high-resolution displays in a nonstop process. It has been intensively investigated with optically transparent inorganic materials such as diamond like carbon, SiC, SiOx, SiNx, Ta2O5 and SnO2 as a replacement for conventional PI layers.
In this thesis, It was demonstrated that a solution-derived Y2O3 film treated by IB irradiation as a LC alignment layer. Solution processing is adopted to replace the sputtering method for the deposition of Y2O3 films as an LC alignment layer and the reason is that it is an easy way to make films even if it is not under vacuum conditions. When making films, several different annealing temperatures were used and it was found that optimized annealing temperature to achieve uniform and homogeneous LC alignment presenting high electro-optical performance. Through X-ray photoelectron spectroscopy (XPS) analysis, it was identified that annealing and IB irradiation process affects surface formation and modification of Y2O3 films which are an important factor to achieve uniformity of the LC alignment and to control the pretilt angle. Twisted nematic-LC cells have been fabricated with IB-irradiated Y2O3 films showing superior electro-optical (EO) properties, which indicates that the proposed solution-derived Y2O3 films have a strong potential for a production of advanced LC displays.