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      Nano-floating gate capacitor with SnO<sub>2</sub> quantum dots distributed in polyimide dielectrics

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      https://www.riss.kr/link?id=A107621247

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      <P>Self-assembled SnO<SUB>2</SUB> quantum dots were fabricated by a chemical process between a BPDA-PDA polyamic acid and a Sn film. A nano-floating gate capacitor having metal–insulator–semiconductor structure has been formed on p-type Si substrate with SnO<SUB>2</SUB> quantum dots and dielectric polymer layer. The size and density of fabricated SnO<SUB>2</SUB> quantum dot were about 15 nm and 2.4 × 10<SUP>11</SUP> cm<SUP>–2</SUP>, respectively. The electrical properties of the nano-floating gate capacitor have been investigated by measuring capacitance–voltage characteristics. Then, the flat-band voltage shift due to charging of the electron in SnO<SUB>2</SUB> quantum dot was ranged from 1.2 V to 4 V. And the transmission electron microscopy and the optical absorption spectra have been measured to investigate the morphology and absorbance of the SnO<SUB>2</SUB> quantum dots embedded in polyimide. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)</P>
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      <P>Self-assembled SnO<SUB>2</SUB> quantum dots were fabricated by a chemical process between a BPDA-PDA polyamic acid and a Sn film. A nano-floating gate capacitor having metal–insulator–semiconductor structure has been f...

      <P>Self-assembled SnO<SUB>2</SUB> quantum dots were fabricated by a chemical process between a BPDA-PDA polyamic acid and a Sn film. A nano-floating gate capacitor having metal–insulator–semiconductor structure has been formed on p-type Si substrate with SnO<SUB>2</SUB> quantum dots and dielectric polymer layer. The size and density of fabricated SnO<SUB>2</SUB> quantum dot were about 15 nm and 2.4 × 10<SUP>11</SUP> cm<SUP>–2</SUP>, respectively. The electrical properties of the nano-floating gate capacitor have been investigated by measuring capacitance–voltage characteristics. Then, the flat-band voltage shift due to charging of the electron in SnO<SUB>2</SUB> quantum dot was ranged from 1.2 V to 4 V. And the transmission electron microscopy and the optical absorption spectra have been measured to investigate the morphology and absorbance of the SnO<SUB>2</SUB> quantum dots embedded in polyimide. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)</P>

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