The mechanism of methane sensing using a Pt-SiC diode was investigated over the temperature range of 400∼600 ℃. The effects of the methane gas reaction on the parameters, such as the barrier height and the initial rate of the methane gas reaction,...
The mechanism of methane sensing using a Pt-SiC diode was investigated over the temperature range of 400∼600 ℃. The effects of the methane gas reaction on the parameters, such as the barrier height and the initial rate of the methane gas reaction, were also investigated. The methane gas reaction kinetics on the device are discussed and the physical and the chemical mechanisms responsible for methane detection are proposed. Analysis of the steady-state reaction kinetics using the I-V method confirmed that the methane gas reaction processes are responsible for the barrier-height change in the diodes.