We develop an ultra-microtome(UT) inside the vacuum chamber for an FE-SEM(Field Emission Scanning Electron Microscope) for nanometer-level 3D imaging. By applying a leaf spring to the UT design, the limited space inside the vacuum chamber is effective...
We develop an ultra-microtome(UT) inside the vacuum chamber for an FE-SEM(Field Emission Scanning Electron Microscope) for nanometer-level 3D imaging. By applying a leaf spring to the UT design, the limited space inside the vacuum chamber is effectively used, and the movement trajectory of the cutting knife is limited to one dimension so that the specimen can be cut flat in the direction perpendicular to the optical axis.