Recently, ceramic substrate is selected for an alternative substrate board for high-speed circuits due to its low-thermal expansion. Generally, metallization of ceramic substrate is fabricated by electroless copper plating. But it has been troubled fo...
Recently, ceramic substrate is selected for an alternative substrate board for high-speed circuits due to its low-thermal expansion. Generally, metallization of ceramic substrate is fabricated by electroless copper plating. But it has been troubled for its weak adhesion strength between the ceramic board and copper layers. To enhance adhesion strength, we have studied effects of ultrasonic agitation for adhesion strength between metal and ceramic boards. In catalyst treatment, high density Pd nuclei of small size were formed during ultrasonic agitation compared that of no stirring. In this case, the adhesion strength was enhanced about 20% by using ultrasonic agitation.