비정상상태 유동층 CVD 반응기에서의 입자 크기 분포의 모사 = Modeling and Simulation of Particle Size Distribution in an Unsteady State CVD Fluidized Bed Reactor

다국어 초록 (Multilingual Abstract)

A model was established to predict the particle size distribution and the particle growing rate in an unsteady state CVD fluidized bed reactor, in which high purity polycrystalline silicon particles were grown by a pyrolysis of silane gas(SiH₄) and chemical vapor deposition (CVD) on seed particles. It was concluded from the simulation that particle size distribution is influenced by the initial size distribution of particle which was introduced in the fluidized bed and the size distribution is broadened as time elapses. It was found from the comparison between the model simulations and the experimental results that the model predicts the particle growing rate and operation conditions for fluidized bed reactors accurately.