고밀도 유도결합 플라즈마원 유체 수송 시뮬레이션을 위한 모델 및 수치해석 방법 비교 = Comparison of Models and Numerical Analysis Methods in Fluid Simulation of High Density Inductively Coupled Plasma Sources

다국어 초록 (Multilingual Abstract)

Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme[1]. Comparing the exactness, the numerical stability and the efficiency of the various models, the most adoptable model is suggested.

참고문헌 (Reference)

1 최덕인, "플라즈마 물리학과 핵융합" 69-79, 1985.

2 R. A. Stewart, "Two-dimensional fluid model of high density inductively coupled plasma sources" 1994

3 Ming Li, "Two-Dimensional Simulation of Inductively Plasma Sources with Self-Consistent Power Deposition" 558-, 1995

4 J. D. Bukowski, "Two- dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles" 80 (80): 1996

5 H. H. Choe, "The Effect of Inertial Terms in the Momentum Equation in Fluid Simulation of High Density Plasma Discharge" s859-s866, 2003

6 V. A. Godyak, "Smooth plasma- sheath transition in a hydrodynamic model" 159-, 1990

7 Michael A. Lieberman, "Principles of Plasma Discharges and Materials Processing" 154-163, 1994.

8 R. A. Stewart, "Plasma uniformity in high-density inductively coupled plasma tools" 36 -, 1995

9 N. H. Choi, "One-Dimensional Hybrid Modeling and simulation of Eectron Cyclotron Resonance Dis- charge" 617-, 1995

10 N. S. Yoon, "One-Dimensional Fluid Model of ECR Discharge with Inhogeneity Effects of External Magnetic Field" 609-, 1995

11 T. J. Sommerer, "Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He" 1654-, 1992

12 S. S. Kim, "Numerical Investigation on Plasma and Poly-Si Etching Uniformly Control over Large Area with a Modified Inductively Coupled Plasma Source" 1384 -, 2001

13 D. Bohm, "Characteristics of Electrical Discharges in Magnetic Field" McGraw-Hill 77-, 1949.

14 S. K. Park, "Analysis of low pressure rf glow discharges using a continuum model" 3904-, 1990

15 T. E. Nitschke, "A comparison of particle in cell and fluid model simulations of low- pressure radio frequency discharges" 5646-, 1994

16 S. S. Kim, "A One-dimensional Model for a TCP discharge including the collisionless electron heating me- chanism" 678-, 1996

17 H. H. Choe, "A New Unconditionally Stable Algorithm for Steady State Fluid Simulation of High Density Plasma Discharge" 550-561, 2001