마이크로 공진형 센서의 주파수 및 진폭 제어

다국어 초록 (Multilingual Abstract)

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

목차 (Table of Contents)

• Abstract
• Ⅰ. 서론
• Ⅱ. 제어 알고리즘 설계
• Ⅲ. 안정성 해석
• Ⅳ. 정밀도 해석
• Ⅴ. 시뮬레이션
• Ⅵ. 결론
• 참고문헌

참고문헌 (Reference)

1 장지혜, "듀얼매스 자이로스코프의 가진제어" 세종대학교 2007

2 A. Seshia, "“Dual Mass Micromachined Gyroscope,” Pat. no. 6, 250, 154, USA"

3 X. Sun, "Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing" 124 (124): 599-605, 2002

4 S. Park, "New Adaptive Mode of Operation for MEMS Gyroscopes" 126 (126): 800-810, 2004

5 박성수, "ECU 내장용 센서류 개발" 2006

6 R. M’Closkey, "Analysis of a Microsensor Automatic Gain Control Loop" 3307-3311, 1999

7 R. Leland, "Adaptive Mode Tuning for Vibrational Gyroscopes" 11 (11): 242-247, 2003