YBaCuO thin films were prepared by plasma-enhanced metalorganic chemical- vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thin films was decreased by around 150℃ due ...
YBaCuO thin films were prepared by plasma-enhanced metalorganic chemical- vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thin films was decreased by around 150℃ due to plasma enhancement. The zero-resistivity temperatures for films grown at 590℃ and 620℃ were 55 K and 80 K, respectively.