The investigation of White-Light interferometry Error due to the differenc between Envelope Peak and Fringe Peak has been performed. We suggest a Compensation method that estimates the variation of phase change with the spectral distribution of the li...
The investigation of White-Light interferometry Error due to the differenc between Envelope Peak and Fringe Peak has been performed. We suggest a Compensation method that estimates the variation of phase change with the spectral distribution of the light source through FFT operation of the interferogram of the surface, and then compensates the measurement errors by calculating formula derived. in this paper.