광음향 효과를 이용한 2층 무반사 코팅막의 열확산도 측정 = Thermal diffusivity measurement of two-layer ar-coating systems using photoacoustic effects

다국어 초록 (Multilingual Abstract)

As the development of ultrahigh power laser system, the laser mirrors must require high-resistant and effectively cooled. So, the study for the optical multilayer systems having large thermal diffusivity become important. In this study, we designed and fabricated two-layer anti-reflection (AR) optical coating samples, in different evaporation conditions of coating speeds (10, 20 $\AA$/s) and substrate temperatures (50, 100, 150, 20$0^{\circ}C$), using two dielectric materials $MgF_2$ and ZnS which have different refractive indices and measured the through-plane thermal diffusivity by using photoacoustic effect. The optical thicknesses of $MgF_2$ and ZnS layer were fixed as 5/4λ (λ=514.5nm) and λ, respectively, and the thermal diffusivity of the samples fabricated in the different conditions was obtained from the measured amplitude of photoacoustic signals by changing chopping frequency of $Ar^+$ layer beam. The results told us that the thermal diffusivity of the sample fabricated in the condition of 10 $\AA$/s and 15$0^{\circ}C$ showed the largest value.