플라즈마 표면처리가 표면에너지와 Cr코팅층 / 기판의 부착 특성에 미치는 영향 = Effect of Plasma Surface Treatment on Surface Energy and Adhesion Properties for Cr Coating on Substrates

다국어 초록 (Multilingual Abstract)

Atmospheric plasma surface treatment (APST) was applied on the soda-lime glass and silicon wafer(Si-wafer) substrates for surface modification. The surface energy for the surface treated samples was measured using the wetting angle. The effect of APST on surface energy and interface properties between sputtered chromium (Cr) coatings and substrates was investigated. The surface energy increased linearly and reached a maximum value of 74 mJ/m2 by APST. The increase in surface energy is due to the increased value of the polar component in surface energy. When the samples were exposed to the air, the increased surface energy decreased and tended to have hydrophobicity. The work of adhesion for the surface treated samples was calculated using the data of surface tension for water. We demonstrated that the trend of work of adhesion for the samples was similar to the change of adhesion strength between sputtered Cr coatings and the surface treated substrates. (Received March 13, 2013)